Faculty Mentor

Jason Stoke, Carmen Nezat

Presentation Type

Poster

Primary Discipline of Presentation

Physics

Abstract

Thin films are a part of semiconductor devices and electronics we use everyday. There are many methods of depositing thin films on substrates and one of the easiest and cost effective is spin coating. Compared to other conventional deposition methods such as plasma enhanced chemical vapor (PECVD),electroplating, pulsed laser deposition (PLD), and others, spin coating does not require expensive equipment or a vacuum system. In this study, thin films of zinc oxide were deposited on glass substrates via spin coating under varying processing conditions. These films were then imaged in a scanning electron microscope to investigate correlations between processing conditions and film quality.

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Spin Coating Thin Films of Zinc Oxide

Thin films are a part of semiconductor devices and electronics we use everyday. There are many methods of depositing thin films on substrates and one of the easiest and cost effective is spin coating. Compared to other conventional deposition methods such as plasma enhanced chemical vapor (PECVD),electroplating, pulsed laser deposition (PLD), and others, spin coating does not require expensive equipment or a vacuum system. In this study, thin films of zinc oxide were deposited on glass substrates via spin coating under varying processing conditions. These films were then imaged in a scanning electron microscope to investigate correlations between processing conditions and film quality.